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Handbook of Silicon Based MEMS

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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is
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Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most i... 更多
属性
出版社
Elsevier
ISBN
9780128177877
出版年
2020-4-17
装帧
Paperback
价格
USD 290.00
页数
1026

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2023
2023-09
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